Coverart for item
The Resource Chemical physics of thin film deposition processes for micro- and nano-technologies, edited by Yves Pauleau

Chemical physics of thin film deposition processes for micro- and nano-technologies, edited by Yves Pauleau

Label
Chemical physics of thin film deposition processes for micro- and nano-technologies
Title
Chemical physics of thin film deposition processes for micro- and nano-technologies
Statement of responsibility
edited by Yves Pauleau
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
DLC
Dewey number
621.3815/2
Illustrations
illustrations
Index
index present
LC call number
TA418.9.T45
LC item number
C47 2002
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorName
Pauleau, Y
Series statement
NATO science series. Series II, Mathematics, physics, and chemistry
Series volume
v. 55
http://library.link/vocab/subjectName
  • Thin films
  • Nanotechnology
Label
Chemical physics of thin film deposition processes for micro- and nano-technologies, edited by Yves Pauleau
Instantiates
Publication
Note
"Published in cooperation with NATO Scientific Affairs Division."
Bibliography note
Includes bibliographical references and index
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
49901833
Dimensions
25 cm
Extent
xiii, 363 pages
Isbn
9781402005244
Isbn Type
(alk. paper)
Lccn
2002072962
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations
Label
Chemical physics of thin film deposition processes for micro- and nano-technologies, edited by Yves Pauleau
Publication
Note
"Published in cooperation with NATO Scientific Affairs Division."
Bibliography note
Includes bibliographical references and index
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
49901833
Dimensions
25 cm
Extent
xiii, 363 pages
Isbn
9781402005244
Isbn Type
(alk. paper)
Lccn
2002072962
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations

Library Locations

    • Engineering Library & Technology CommonsBorrow it
      W2001 Lafferre Hall, Columbia, MO, 65211, US
      38.946102 -92.330125
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