Coverart for item
The Resource Computational lithography, Xu Ma and Gonzalo R. Arce

Computational lithography, Xu Ma and Gonzalo R. Arce

Label
Computational lithography
Title
Computational lithography
Statement of responsibility
Xu Ma and Gonzalo R. Arce
Creator
Contributor
Subject
Language
eng
Summary
A Unified Summary of the Models and Optimization Methods Used in Computational Lithography. Optical lithography is one of the most challenging areas of current integrated circuit manufacturing technology. The semiconductor industry is relying more on resolution enhancement techniques (RETs), since their implementation does not require significant changes in fabrication infrastructure. Computational Lithography is the first book to address the computational optimization of RETs in optical lithography, providing an in-depth discussion of optimal optical proximity correction (OPC), phase shifting
Member of
Cataloging source
DG1
http://library.link/vocab/creatorDate
1983-
http://library.link/vocab/creatorName
Ma, Xu
Dewey number
621.3815/31
Illustrations
illustrations
Index
index present
LC call number
TK7872.M3
LC item number
C66 2010
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
http://library.link/vocab/relatedWorkOrContributorName
Arce, Gonzalo R
Series statement
Wiley series in pure and applied optics
http://library.link/vocab/subjectName
  • Microlithography
  • Integrated circuits
  • Photolithography
  • Semiconductors
  • Resolution (Optics)
  • TECHNOLOGY & ENGINEERING
  • Resolution (Optics)
Label
Computational lithography, Xu Ma and Gonzalo R. Arce
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
Optical Lithography Systems -- Rule-Based Resolution Enhancement Techniques -- Fundamentals of Optimization -- Computational Lithography with Coherent Illumination -- Regularization Framework -- Computational Lithography with Partially Coherent Illumination -- Other RET Optimization Techniques -- Source and Mask Optimization -- Coherent Thick-Mask Optimization -- Conclusions and New Directions of Computational Lithography -- Appendix A: Formula Derivation in Chapter 5 -- Appendix B: Manhattan Geometry -- Appendix C: Formula Derivation in Chapter 6 -- Appendix D: Formula Derivation in Chapter 7 -- Appendix E: Formula Derivation in Chapter 8 -- Appendix F: Formula Derivation in Chapter 9 -- Appendix G: Formula Derivation in Chapter 10 -- Appendix H: Software Guide
Control code
689995793
Dimensions
unknown
Extent
1 online resource (xv, 226 pages)
Form of item
online
Isbn
9780470618936
Lccn
2009049250
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other control number
  • 10.1002/9780470618943
  • 9786612755965
Other physical details
illustrations
http://library.link/vocab/ext/overdrive/overdriveId
10.1002/9780470618943
Specific material designation
remote
System control number
(OCoLC)689995793
Label
Computational lithography, Xu Ma and Gonzalo R. Arce
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
online resource
Carrier category code
  • cr
Carrier MARC source
rdacarrier
Color
multicolored
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
Optical Lithography Systems -- Rule-Based Resolution Enhancement Techniques -- Fundamentals of Optimization -- Computational Lithography with Coherent Illumination -- Regularization Framework -- Computational Lithography with Partially Coherent Illumination -- Other RET Optimization Techniques -- Source and Mask Optimization -- Coherent Thick-Mask Optimization -- Conclusions and New Directions of Computational Lithography -- Appendix A: Formula Derivation in Chapter 5 -- Appendix B: Manhattan Geometry -- Appendix C: Formula Derivation in Chapter 6 -- Appendix D: Formula Derivation in Chapter 7 -- Appendix E: Formula Derivation in Chapter 8 -- Appendix F: Formula Derivation in Chapter 9 -- Appendix G: Formula Derivation in Chapter 10 -- Appendix H: Software Guide
Control code
689995793
Dimensions
unknown
Extent
1 online resource (xv, 226 pages)
Form of item
online
Isbn
9780470618936
Lccn
2009049250
Media category
computer
Media MARC source
rdamedia
Media type code
  • c
Other control number
  • 10.1002/9780470618943
  • 9786612755965
Other physical details
illustrations
http://library.link/vocab/ext/overdrive/overdriveId
10.1002/9780470618943
Specific material designation
remote
System control number
(OCoLC)689995793

Library Locations

    • Ellis LibraryBorrow it
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      38.944491 -92.326012
    • Engineering Library & Technology CommonsBorrow it
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      38.946102 -92.330125
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