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The Resource Deposition and growth : limits for microelectronics, editor: G.W. Rubloff

Deposition and growth : limits for microelectronics, editor: G.W. Rubloff

Label
Deposition and growth : limits for microelectronics
Title
Deposition and growth
Title remainder
limits for microelectronics
Statement of responsibility
editor: G.W. Rubloff
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
TXA
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Rubloff, G. W
  • American Institute of Physics
  • American Vacuum Society
Series statement
  • American Vacuum Society series
  • American Institute of Physics conference proceedings
Series volume
  • 4
  • no. 167
http://library.link/vocab/subjectName
  • Thin films
  • Microelectronics
  • Microelectronics
Label
Deposition and growth : limits for microelectronics, editor: G.W. Rubloff
Instantiates
Publication
Note
Topical conference held in Anaheim, California, on November 3-5, 1987, in conjunction with the American Vacuum Society's 34th National Symposium
Bibliography note
Includes bibliographies and index
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
18610175
Dimensions
25 cm
Extent
388 pages
Isbn
9780883183670
Lccn
88071432
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations
System control number
(WaOLN)1193196
Label
Deposition and growth : limits for microelectronics, editor: G.W. Rubloff
Publication
Note
Topical conference held in Anaheim, California, on November 3-5, 1987, in conjunction with the American Vacuum Society's 34th National Symposium
Bibliography note
Includes bibliographies and index
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
18610175
Dimensions
25 cm
Extent
388 pages
Isbn
9780883183670
Lccn
88071432
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations
System control number
(WaOLN)1193196

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      38.944491 -92.326012
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