The Resource Gate Dielectric Integrity : Material, Process and Tool Qualification, (electronic resource:)
Gate Dielectric Integrity : Material, Process and Tool Qualification, (electronic resource:)
Resource Information
The item Gate Dielectric Integrity : Material, Process and Tool Qualification, (electronic resource:) represents a specific, individual, material embodiment of a distinct intellectual or artistic creation found in University of Missouri Libraries.This item is available to borrow from 1 library branch.
Resource Information
The item Gate Dielectric Integrity : Material, Process and Tool Qualification, (electronic resource:) represents a specific, individual, material embodiment of a distinct intellectual or artistic creation found in University of Missouri Libraries.
This item is available to borrow from 1 library branch.
- Summary
-
- Annotation
- Annotation:
- Language
- eng
- Isbn
- 9780803126152
- Label
- Gate Dielectric Integrity : Material, Process and Tool Qualification
- Title
- Gate Dielectric Integrity
- Title remainder
- Material, Process and Tool Qualification
- Language
- eng
- Summary
-
- Annotation
- Annotation:
- Cataloging source
- BIP US
- http://library.link/vocab/creatorName
- Gupta, D. C.
- Dewey number
- 621.3815/2
- LC call number
- TK7871.85.G32 2000
- http://library.link/vocab/relatedWorkOrContributorDate
- 1937
- http://library.link/vocab/relatedWorkOrContributorName
- Brown, George A.
- Series statement
- STP Ser.
- Series volume
- Vol. 1382
- Summary expansion
-
- Contains papers from a January 1999 conference held in San Jose, California, describing concepts and metrology of Gate Dielectric Integrity (GDI) and discussing its applications for material and device processes and tool qualification. Topics include methods, protocols, and reliability assessment as related to dielectric integrity. Papers are organized in sections on concepts, thin gate dielectrics, characterization and applications, and standardization. There is also a section summarizing panel discussions. Gupta is affiliated with Mitsubishi Silicon America. Brown is affiliated with Texas Instruments Inc. Annotation copyrighted by Book News, Inc., Portland, OR
- Contains papers from a January 1999 conference held in San Jose, California, describing concepts and metrology of Gate Dielectric Integrity (GDI) and discussing its applications for material and device processes and tool qualification. Topics include methods, protocols, and reliability assessment as related to dielectric integrity. Papers are organized in sections on concepts, thin gate dielectrics, characterization and applications, and standardization. There is also a section summarizing panel discussions. Gupta is affiliated with Mitsubishi Silicon America. Brown is affiliated with Texas Instruments Inc. Annotation copyrighted by Book News, Inc., Portland, OR
- Label
- Gate Dielectric Integrity : Material, Process and Tool Qualification, (electronic resource:)
- Control code
- OCM1bookssj0001489998
- Dimensions
- unknown
- Isbn
- 9780803126152
- Lccn
- 99086920
- Other control number
- 9780803126152
- http://library.link/vocab/ext/overdrive/overdriveId
- stp 1382
- Specific material designation
- remote
- System control number
- (WaSeSS)bookssj0001489998
- Label
- Gate Dielectric Integrity : Material, Process and Tool Qualification, (electronic resource:)
- Control code
- OCM1bookssj0001489998
- Dimensions
- unknown
- Isbn
- 9780803126152
- Lccn
- 99086920
- Other control number
- 9780803126152
- http://library.link/vocab/ext/overdrive/overdriveId
- stp 1382
- Specific material designation
- remote
- System control number
- (WaSeSS)bookssj0001489998
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.library.missouri.edu/portal/Gate-Dielectric-Integrity--Material-Process-and/kpTj8MfZBpQ/" typeof="Book http://bibfra.me/vocab/lite/Item"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.library.missouri.edu/portal/Gate-Dielectric-Integrity--Material-Process-and/kpTj8MfZBpQ/">Gate Dielectric Integrity : Material, Process and Tool Qualification, (electronic resource:)</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.library.missouri.edu/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.library.missouri.edu/">University of Missouri Libraries</a></span></span></span></span></div>
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.library.missouri.edu/portal/Gate-Dielectric-Integrity--Material-Process-and/kpTj8MfZBpQ/" typeof="Book http://bibfra.me/vocab/lite/Item"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.library.missouri.edu/portal/Gate-Dielectric-Integrity--Material-Process-and/kpTj8MfZBpQ/">Gate Dielectric Integrity : Material, Process and Tool Qualification, (electronic resource:)</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.library.missouri.edu/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.library.missouri.edu/">University of Missouri Libraries</a></span></span></span></span></div>
