Coverart for item
The Resource Gate Dielectric Integrity : Material, Process and Tool Qualification, (electronic resource:)

Gate Dielectric Integrity : Material, Process and Tool Qualification, (electronic resource:)

Label
Gate Dielectric Integrity : Material, Process and Tool Qualification
Title
Gate Dielectric Integrity
Title remainder
Material, Process and Tool Qualification
Creator
Contributor
Editor
Subject
Language
eng
Summary
  • Annotation
  • Annotation:
Cataloging source
BIP US
http://library.link/vocab/creatorName
Gupta, D. C.
Dewey number
621.3815/2
LC call number
TK7871.85.G32 2000
http://library.link/vocab/relatedWorkOrContributorDate
1937
http://library.link/vocab/relatedWorkOrContributorName
Brown, George A.
Series statement
STP Ser.
Series volume
Vol. 1382
Summary expansion
  • Contains papers from a January 1999 conference held in San Jose, California, describing concepts and metrology of Gate Dielectric Integrity (GDI) and discussing its applications for material and device processes and tool qualification. Topics include methods, protocols, and reliability assessment as related to dielectric integrity. Papers are organized in sections on concepts, thin gate dielectrics, characterization and applications, and standardization. There is also a section summarizing panel discussions. Gupta is affiliated with Mitsubishi Silicon America. Brown is affiliated with Texas Instruments Inc. Annotation copyrighted by Book News, Inc., Portland, OR
  • Contains papers from a January 1999 conference held in San Jose, California, describing concepts and metrology of Gate Dielectric Integrity (GDI) and discussing its applications for material and device processes and tool qualification. Topics include methods, protocols, and reliability assessment as related to dielectric integrity. Papers are organized in sections on concepts, thin gate dielectrics, characterization and applications, and standardization. There is also a section summarizing panel discussions. Gupta is affiliated with Mitsubishi Silicon America. Brown is affiliated with Texas Instruments Inc. Annotation copyrighted by Book News, Inc., Portland, OR
Label
Gate Dielectric Integrity : Material, Process and Tool Qualification, (electronic resource:)
Instantiates
Publication
Control code
OCM1bookssj0001489998
Dimensions
unknown
Isbn
9780803126152
Lccn
99086920
Other control number
9780803126152
http://library.link/vocab/ext/overdrive/overdriveId
stp 1382
Specific material designation
remote
System control number
(WaSeSS)bookssj0001489998
Label
Gate Dielectric Integrity : Material, Process and Tool Qualification, (electronic resource:)
Publication
Control code
OCM1bookssj0001489998
Dimensions
unknown
Isbn
9780803126152
Lccn
99086920
Other control number
9780803126152
http://library.link/vocab/ext/overdrive/overdriveId
stp 1382
Specific material designation
remote
System control number
(WaSeSS)bookssj0001489998

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