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The Resource Glow discharge processes : sputtering and plasma etching, Brian Chapman

Glow discharge processes : sputtering and plasma etching, Brian Chapman

Label
Glow discharge processes : sputtering and plasma etching
Title
Glow discharge processes
Title remainder
sputtering and plasma etching
Statement of responsibility
Brian Chapman
Creator
Subject
Language
eng
Cataloging source
DLC
http://library.link/vocab/creatorName
Chapman, Brian N
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/subjectName
  • Sputtering (Physics)
  • Glow discharges
  • Plasma etching
Label
Glow discharge processes : sputtering and plasma etching, Brian Chapman
Instantiates
Publication
Note
  • "A Wiley-Interscience publication."
  • Includes index
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
6379539
Dimensions
24 cm
Extent
xv, 406 pages
Isbn
9780471078289
Lccn
80017047
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations
System control number
(WaOLN)170207
Label
Glow discharge processes : sputtering and plasma etching, Brian Chapman
Publication
Note
  • "A Wiley-Interscience publication."
  • Includes index
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
6379539
Dimensions
24 cm
Extent
xv, 406 pages
Isbn
9780471078289
Lccn
80017047
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations
System control number
(WaOLN)170207

Library Locations

    • Engineering Library & Technology CommonsBorrow it
      W2001 Lafferre Hall, Columbia, MO, 65211, US
      38.946102 -92.330125
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