The Resource Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006, editors, Karen J. Kirkby [and others] ; sponsoring organizations : Advanced Beam Technology - AIBT [and others]
Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006, editors, Karen J. Kirkby [and others] ; sponsoring organizations : Advanced Beam Technology - AIBT [and others]
Resource Information
The item Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006, editors, Karen J. Kirkby [and others] ; sponsoring organizations : Advanced Beam Technology - AIBT [and others] represents a specific, individual, material embodiment of a distinct intellectual or artistic creation found in University of Missouri Libraries.This item is available to borrow from 1 library branch.
Resource Information
The item Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006, editors, Karen J. Kirkby [and others] ; sponsoring organizations : Advanced Beam Technology - AIBT [and others] represents a specific, individual, material embodiment of a distinct intellectual or artistic creation found in University of Missouri Libraries.
This item is available to borrow from 1 library branch.
- Language
- eng
- Extent
- xvii, 664 pages
- Contents
-
- Doping processes in semiconductors
- Cluster implantation in doping
- PIII and plasma doping
- Materials : novel techniques and applications
- Implant technology
- Implant technology (materials)
- Process control & yield
- Process control & yield (metrology)
- Materials
- Isbn
- 9780735403659
- Label
- Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006
- Title
- Ion implantation technology
- Title remainder
- 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006
- Statement of responsibility
- editors, Karen J. Kirkby [and others] ; sponsoring organizations : Advanced Beam Technology - AIBT [and others]
- Title variation
- IIT 2006
- Language
- eng
- Cataloging source
- GZN
- Illustrations
-
- illustrations
- portraits
- charts
- Index
- index present
- Literary form
- non fiction
- http://bibfra.me/vocab/lite/meetingDate
- 2006
- http://bibfra.me/vocab/lite/meetingName
- International Conference on Ion Implantation Technology
- Nature of contents
- bibliography
- http://library.link/vocab/relatedWorkOrContributorName
- Kirkby, Karen J
- Series statement
- AIP conference proceedings,
- Series volume
- v. 866
- http://library.link/vocab/subjectName
-
- Semiconductors
- Ion implantation
- Semiconductor doping
- Label
- Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006, editors, Karen J. Kirkby [and others] ; sponsoring organizations : Advanced Beam Technology - AIBT [and others]
- Bibliography note
- Includes bibliographical references and index
- Carrier category
- volume
- Carrier category code
-
- nc
- Carrier MARC source
- rdacarrier
- Content category
- text
- Content type code
-
- txt
- Content type MARC source
- rdacontent
- Contents
- Doping processes in semiconductors -- Cluster implantation in doping -- PIII and plasma doping -- Materials : novel techniques and applications -- Implant technology -- Implant technology (materials) -- Process control & yield -- Process control & yield (metrology) -- Materials
- Control code
- 77535657
- Dimensions
- 28 cm
- Extent
- xvii, 664 pages
- Isbn
- 9780735403659
- Lccn
- 2006935319
- Media category
- unmediated
- Media MARC source
- rdamedia
- Media type code
-
- n
- Other physical details
- illustrations, charts, portraits
- Label
- Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006, editors, Karen J. Kirkby [and others] ; sponsoring organizations : Advanced Beam Technology - AIBT [and others]
- Bibliography note
- Includes bibliographical references and index
- Carrier category
- volume
- Carrier category code
-
- nc
- Carrier MARC source
- rdacarrier
- Content category
- text
- Content type code
-
- txt
- Content type MARC source
- rdacontent
- Contents
- Doping processes in semiconductors -- Cluster implantation in doping -- PIII and plasma doping -- Materials : novel techniques and applications -- Implant technology -- Implant technology (materials) -- Process control & yield -- Process control & yield (metrology) -- Materials
- Control code
- 77535657
- Dimensions
- 28 cm
- Extent
- xvii, 664 pages
- Isbn
- 9780735403659
- Lccn
- 2006935319
- Media category
- unmediated
- Media MARC source
- rdamedia
- Media type code
-
- n
- Other physical details
- illustrations, charts, portraits
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.library.missouri.edu/portal/Ion-implantation-technology--16th-International/Y_ADBHbtEuI/" typeof="Book http://bibfra.me/vocab/lite/Item"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.library.missouri.edu/portal/Ion-implantation-technology--16th-International/Y_ADBHbtEuI/">Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006, editors, Karen J. Kirkby [and others] ; sponsoring organizations : Advanced Beam Technology - AIBT [and others]</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.library.missouri.edu/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.library.missouri.edu/">University of Missouri Libraries</a></span></span></span></span></div>
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<div class="citation" vocab="http://schema.org/"><i class="fa fa-external-link-square fa-fw"></i> Data from <span resource="http://link.library.missouri.edu/portal/Ion-implantation-technology--16th-International/Y_ADBHbtEuI/" typeof="Book http://bibfra.me/vocab/lite/Item"><span property="name http://bibfra.me/vocab/lite/label"><a href="http://link.library.missouri.edu/portal/Ion-implantation-technology--16th-International/Y_ADBHbtEuI/">Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006, editors, Karen J. Kirkby [and others] ; sponsoring organizations : Advanced Beam Technology - AIBT [and others]</a></span> - <span property="potentialAction" typeOf="OrganizeAction"><span property="agent" typeof="LibrarySystem http://library.link/vocab/LibrarySystem" resource="http://link.library.missouri.edu/"><span property="name http://bibfra.me/vocab/lite/label"><a property="url" href="http://link.library.missouri.edu/">University of Missouri Libraries</a></span></span></span></span></div>
