Coverart for item
The Resource Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006, editors, Karen J. Kirkby [and others] ; sponsoring organizations : Advanced Beam Technology - AIBT [and others]

Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006, editors, Karen J. Kirkby [and others] ; sponsoring organizations : Advanced Beam Technology - AIBT [and others]

Label
Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006
Title
Ion implantation technology
Title remainder
16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006
Statement of responsibility
editors, Karen J. Kirkby [and others] ; sponsoring organizations : Advanced Beam Technology - AIBT [and others]
Title variation
IIT 2006
Creator
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
GZN
Illustrations
  • illustrations
  • portraits
  • charts
Index
index present
Literary form
non fiction
http://bibfra.me/vocab/lite/meetingDate
2006
http://bibfra.me/vocab/lite/meetingName
International Conference on Ion Implantation Technology
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorName
Kirkby, Karen J
Series statement
AIP conference proceedings,
Series volume
v. 866
http://library.link/vocab/subjectName
  • Semiconductors
  • Ion implantation
  • Semiconductor doping
Label
Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006, editors, Karen J. Kirkby [and others] ; sponsoring organizations : Advanced Beam Technology - AIBT [and others]
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
Doping processes in semiconductors -- Cluster implantation in doping -- PIII and plasma doping -- Materials : novel techniques and applications -- Implant technology -- Implant technology (materials) -- Process control & yield -- Process control & yield (metrology) -- Materials
Control code
77535657
Dimensions
28 cm
Extent
xvii, 664 pages
Isbn
9780735403659
Lccn
2006935319
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations, charts, portraits
Label
Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006, editors, Karen J. Kirkby [and others] ; sponsoring organizations : Advanced Beam Technology - AIBT [and others]
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Contents
Doping processes in semiconductors -- Cluster implantation in doping -- PIII and plasma doping -- Materials : novel techniques and applications -- Implant technology -- Implant technology (materials) -- Process control & yield -- Process control & yield (metrology) -- Materials
Control code
77535657
Dimensions
28 cm
Extent
xvii, 664 pages
Isbn
9780735403659
Lccn
2006935319
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations, charts, portraits

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