Coverart for item
The Resource Modeling of chemical vapor deposition of tungsten films, Chris R. Kleijn, Christoph Werner

Modeling of chemical vapor deposition of tungsten films, Chris R. Kleijn, Christoph Werner

Label
Modeling of chemical vapor deposition of tungsten films
Title
Modeling of chemical vapor deposition of tungsten films
Statement of responsibility
Chris R. Kleijn, Christoph Werner
Creator
Contributor
Subject
Language
eng
Member of
Cataloging source
DLC
http://library.link/vocab/creatorDate
1960-
http://library.link/vocab/creatorName
Kleijn, Chris R.
Illustrations
illustrations
Index
no index present
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorDate
1949-
http://library.link/vocab/relatedWorkOrContributorName
Werner, Christoph
Series statement
Progress in numerical simulation for microelectronics
Series volume
vol. 2
http://library.link/vocab/subjectName
  • Semiconductor films
  • Vapor-plating
Label
Modeling of chemical vapor deposition of tungsten films, Chris R. Kleijn, Christoph Werner
Instantiates
Publication
Bibliography note
Includes bibliographical references
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
27187530
Dimensions
23 cm
Extent
138 pages
Isbn
9783764328580
Isbn Type
(Basel : acid-free paper)
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations
System control number
(WaOLN)1516840
Label
Modeling of chemical vapor deposition of tungsten films, Chris R. Kleijn, Christoph Werner
Publication
Bibliography note
Includes bibliographical references
Carrier category
volume
Carrier category code
  • nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
  • txt
Content type MARC source
rdacontent
Control code
27187530
Dimensions
23 cm
Extent
138 pages
Isbn
9783764328580
Isbn Type
(Basel : acid-free paper)
Media category
unmediated
Media MARC source
rdamedia
Media type code
  • n
Other physical details
illustrations
System control number
(WaOLN)1516840

Library Locations

    • Engineering Library & Technology CommonsBorrow it
      W2001 Lafferre Hall, Columbia, MO, 65211, US
      38.946102 -92.330125
    • University of Missouri Libraries DepositoryBorrow it
      2908 Lemone Blvd, Columbia, MO, 65211, US
      38.919360 -92.291620
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