Coverart for item
The Resource Plasma processing of materials : scientific opportunities and technological challenges, Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council, (electronic resource)

Plasma processing of materials : scientific opportunities and technological challenges, Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council, (electronic resource)

Label
Plasma processing of materials : scientific opportunities and technological challenges
Title
Plasma processing of materials
Title remainder
scientific opportunities and technological challenges
Statement of responsibility
Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council
Creator
Subject
Language
eng
Cataloging source
DLC
Dewey number
621.044
LC call number
TA2005
LC item number
.N37 1991
http://bibfra.me/vocab/lite/organizationName
National Research Council (U.S.)
http://library.link/vocab/subjectName
  • Plasma engineering
  • Microelectronics
  • Surfaces (Technology)
Label
Plasma processing of materials : scientific opportunities and technological challenges, Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council, (electronic resource)
Instantiates
Publication
Control code
OCM1bookssj0000222460
Dimensions
unknown
Isbn
9780309045971
Lccn
91066812
Specific material designation
remote
System control number
(WaSeSS)bookssj0000222460
Label
Plasma processing of materials : scientific opportunities and technological challenges, Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council, (electronic resource)
Publication
Control code
OCM1bookssj0000222460
Dimensions
unknown
Isbn
9780309045971
Lccn
91066812
Specific material designation
remote
System control number
(WaSeSS)bookssj0000222460

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