Coverart for item
The Resource Run-to-run control in semiconductor manufacturing, edited by James Moyne, Enrique Del Castillo, Arnon Max Hurwitz

Run-to-run control in semiconductor manufacturing, edited by James Moyne, Enrique Del Castillo, Arnon Max Hurwitz

Label
Run-to-run control in semiconductor manufacturing
Title
Run-to-run control in semiconductor manufacturing
Statement of responsibility
edited by James Moyne, Enrique Del Castillo, Arnon Max Hurwitz
Contributor
Subject
Language
eng
Cataloging source
DLC
Dewey number
621.3815/2
Illustrations
illustrations
Index
index present
LC call number
TK7871.85
LC item number
.R86 2001
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Moyne, James
  • Del Castillo, Enrique
  • Hurwitz, Arnon Max
http://library.link/vocab/subjectName
  • Semiconductors
  • Semiconductor industry
  • Electronic packaging
  • Production management
Label
Run-to-run control in semiconductor manufacturing, edited by James Moyne, Enrique Del Castillo, Arnon Max Hurwitz
Instantiates
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
44634370
Dimensions
25 cm
Extent
348 pages
Isbn
9780849311789
Isbn Type
(alk. paper)
Lccn
00059910
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations
Label
Run-to-run control in semiconductor manufacturing, edited by James Moyne, Enrique Del Castillo, Arnon Max Hurwitz
Publication
Bibliography note
Includes bibliographical references and index
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
44634370
Dimensions
25 cm
Extent
348 pages
Isbn
9780849311789
Isbn Type
(alk. paper)
Lccn
00059910
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations

Library Locations

    • Engineering Library & Technology CommonsBorrow it
      W2001 Lafferre Hall, Columbia, MO, 65211, US
      38.946102 -92.330125
    • University of Missouri Libraries DepositoryBorrow it
      2908 Lemone Blvd, Columbia, MO, 65211, US
      38.919360 -92.291620
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